Precision surfaces for microelectronics

Consulting: +49 (0) 6151 86072-41 or sales@adl-gmbh.com

Products & Accessories Power Supplies for Ion Sources

Datasheet for Ion Sources_012022 (340.4 KB)

For the operation of ion sources (Kaufmann and ECR), special power supplies are available. On request, the units can also be equipped with other output voltages or output power. All supplies have either an AS 4-interface, Profibus, EtherCat or RS232/484-interface.

Highlights
  • Wide range of uses in ion beam and plasma process technologies
  • Etching, sputtering and a lot more
  • Innovative applications, e.g., in micro-electronics, optics and sensors

Accelerator GG 03, GG 03.1, GG 08

      Beam GG 12, GG 12.1

      Neutralizer GIP 10, GIP 10.1

Discharge GDI 09

      Cathode GC 10

Contact
ADL Analoge & Digitale Leistungselektronik GmbH
Phone +49 (0) 6151 86072-41
E-Mail sales@adl-gmbh.com
Fax +49 (0) 6151 86072-75
Bunsenstraße 30
64293 Darmstadt
Germany