Especially for delicate coatings

Consulting: +49 (0) 6151 86072-41 or sales@adl-gmbh.com

DC Power Supplies HXF 150 - HXF 300

up to 30 kW Datasheet HXF 150 - HXF 300_012022 (1.22 MB)

The HXF is especially designed for sputtering of sensitive coatings. The fully automatic arc handling reduces the arc energy to less than 0.3 mj / kW. The HXF is electrically and mechanically compatible with the power supplies type HX and has an interface for the operation of pulse generators as well. The impressively compact power supply can be integrated or attached to the plasma chamber in any position. Efficient water cooling ensures the highest reliability even in non-air-conditioned rooms. In order to avoid condensation water, an external magnetic valve can be connected via the integrated temperature control. The output power can be increased up to 240 kW in parallel operation.

Highlights
  • Output Power 15 – 30 kW
  • Parallel operation up to 240 kW
  • Water cooling
  • Magnetic valve control
  • Housing ventilation with integrated particle separator
  • ½ 19” case, 5 HU
  • Flange mounting
  • M8 female thread for crane eye
  • Replaceable, rotatable display
  • Automatic arc handling

 

Front view HXF 150 – HXF 300 in horizontal position
Rear view HXF 150 – HXF 300 in horizontal position
HXF 150 – HXF 300 with rotatable display, for vertical integration
Contact
ADL Analoge & Digitale Leistungselektronik GmbH
Phone +49 (0) 6151 86072-41
E-Mail sales@adl-gmbh.com
Fax +49 (0) 6151 86072-75
Bunsenstraße 30
64293 Darmstadt
Germany